Abstract

The new optical diffractive superresolution element (DSE) is being applied to improve the microfabrication radial superresolution in the two-photon three-dimension (3D) microfabrication system, which appeared only a few years ago and can provide the ability to confine photochemical and physical reactions to the order of laser wavelength in three dimensions. The design method of the DSE is that minimizing M if the lowest limit S l of the S and the highest limit G u of the G is set, where Liu [1] explained the definition of the S, M and G. Simulation test result proved that the microfabrication radial superresolution can be improved by the new optical DSE. The phenomenon can only be interpreted as the intensity of high-order and side of the zero-order diffraction peaks have been clapped under the twophoton absorption (TPA) polymerization threshold. In a word the polymerized volume can be chosen because the S l and the G u is correspondingly adjustable, even if the laser wavelength, objective lens and the photosensitive resin is fixed for a given two-photon microfabrication system. That means the radial superresolution of the two-photon microfabrication can be chosen.

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