Abstract
The micro-vision system is designed for micro-fabrication. This system with force sensor controls micro-fabrication operation. The focus is calculated by one order moment. Gradient evaluation function and frequency domain evaluation function are combined as evaluation function in auto-focus technology. Image definition evaluation function based on gradient is adopted in large step. Image definition evaluation function based on frequency-domain is adopted in small step. Search strategy adopts threshold method and curve fitting method. Edge invariant moment is to recognize objects. The system can measure the distance of three dimensions between the cutting tool and the work-piece. Then the micro-fabrication operation is completed.
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