Abstract
A novel electro-optic integrated acceleration seismic geophone is presented in this paper and it is a new kind of micro-opto-electro-mechanical system (MOEMS). The optical waveguide polarizer, M-Z interferometer, harmonic oscillator system and waveguide phase modulator are integrated monolithically on silicon substrate with dimensions of 30mm×12mm×0.5mm. Mach-Zehnder waveguide interferometer of Si-based MOEMS acceleration seismic geophone is researched and its optimization structure design is accomplished. The material of buffer layer and coating layer is K9 glass. Two Bak7 glass Y-branching waveguides with width of 4μm and thickness of 0.4μm, and six guide mirrors are employed in interferometer. An S-shaped bend is used for the transition connecting two offset parallel waveguides in Y-branching. Because it is difficulty to make the branching angle large using conventional Y-branching, we designed 90o directional change by a vertical mirror facet to realize the special structure between measuring arm and reference arm. The inner dielectric film of the mirror facet is aluminum plating. To prevent polarization state of TE mode polarized light changed after passing through the aluminum film, 4 polarizers with length of 1mm have been used. The simulation results performed in BMP agrees with the theoretical analysis well.
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