Abstract
This article presents the results of an experimental study of the electromagnetic parameters (scattering parameters) of a manufactured experimental sample of a capacitive single-pole single-throw radio-frequency micromechanical switch with an electrostatic activation mechanism designed to operate in the transceiver radio-modules of 5G mobile networks in the frequency range NR FR1, namely at a central resonant electrical frequency of 3,6 GHz. The effective operating frequency range of the developed and manufactured experimental sample of a radio-frequency micromechanical switch is the S-frequency range. The basis for the development of the presented experimental sample is the developed methodology for designing capacitive radio-frequency micromechanical switches with an electrostatic activation mechanism.
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