Abstract

Combined with plasma enhanced chemical vapor deposition (PECVD), atmospheric pressure plasma jet (APPJ) can be used for depositing film on polymer surface due to its flexibility and high stability. In this paper, the APPJ is excited by a microsecond-pulse generator, and Hexamethyldisiloxane (HMDSO), working as the reaction precursor, is injected into the APPJ discharge region by the carrier gas (Ar) to deposit on the surface of epoxy resin. Surface morphology and chemical composition of the epoxy resin surface before and after the deposition are measured by water contact angle measurement, scanning electron microscope (SEM) and fourier transform infrared spectroscope (FTIR), respectively. The decay characteristic of surface charge is analyzed by surface potential measurement system. Experimental results indicate that SiO2-like deposition area on the epoxy resin surface achieves super hydrophilicity and the maximum contact angle reaches 160°. Surface roughness increases and silicon-containing functional groups are introduced on the epoxy resin surface. In addition, surface charge decays faster after APPJ treatment than the original sample, which is beneficial to the enhancement of the flashover voltage on the epoxy resin surface.

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