Abstract
Tool material has been one of the focuses in tool research. Diamond and cubic boron nitride (c-BN) are materials of exceptional and very similar properties that make them extremely valuable not only for the aesthetics of diamond. C-BN is a material synthesized rather recently that has rapidly spurred technological and scientific interest. Presently, both materials have found commercial applications. There is still a long way for the practical application of cBN film. The main problems are such as adhesion, thickness, purity, nucleating, and growth mechanism. We will develop a new way of DC plasma jet CVD way to synthesis the cBN film. The deposition of cBN films can be performed in a DC jet plasma CVD reactor by using an Ar-N2-BF3-H2 gas mixture, on the basis of deposition of diamond has been achieved.
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