Abstract
TPU-coated polyester fabric was used as the substrate of a flexible temperature sensor and Ag nanoparticles were deposited on its surface as the temperature sensing layer by the magnetron sputtering method. The effects of sputtering powers and heat treatment on properties of the sensing layers, such as the temperature coefficient of resistance (TCR), linearity, hysteresis, drift, reliability, and bending resistance, were mainly studied. The results showed that the TCR (0.00234 °C−1) was the highest when sputtering power was 90 W and sputtering pressure was 0.8 Pa. The crystallinity of Ag particles would improve, as the TCR was improved to 0.00262 °C−1 under heat treatment condition at 160°. The Ag layer obtained excellent linearity, lower hysteresis and drift value, as well as good reliability and bending resistance when the sputtering power was 90 W. The flexible temperature sensor based on the coated polyester fabric improved the softness and comfortableness of sensor, which can be further applied in intelligent wearable products.
Highlights
Ag nanoparticles were deposited on its surface as the temperature sensing layer by the magnetron sputtering method
A novel flexible temperature sensor based on TPU-coated polyester fabric was fabricated
When the sputtering power was 90 W, temperature coefficient of resistance (TCR) reached the highest value of 0.00234 ◦ C−1
Summary
Ag nanoparticles were deposited on its surface as the temperature sensing layer by the magnetron sputtering method. The effects of sputtering powers and heat treatment on properties of the sensing layers, such as the temperature coefficient of resistance (TCR), linearity, hysteresis, drift, reliability, and bending resistance, were mainly studied. Flexible electronic devices have shown explosive growth, and a new generation of flexible wearable sensors has become the core of intelligent flexible electronic systems. These sensors played a crucial role and have important applications in many fields, such as health monitoring [7] and medical care [8,9]. Application of the thermal resistance sensor in the field of health monitoring, clinical diagnosis, and treatment is beneficial
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
