Abstract
Design an all-optical solid-state scanner chip, which can realize high speed light deflection in a very small space, instead of electron beam deflection scan image converter tube and opto-mechanical scanner, cancel the complicated mechanical components, use the all-optical scanning to realize the super fast phenomenon observation. The beam deflection system is based on semiconductor optical waveguide core layer carrier induced refractive index change effect to realize, its development work is mainly divided into semiconductor optical waveguide and saw prisms two parts. And through the experiment, we measured deflection angle of the scanner chip to 1053nm signal light.
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