Abstract
This study investigated various types of Micro-Electro- mechanical Systems (MEMS)-based detectors, which enabled the derivation of a general formula via microwave network analysis. Multiple microwave parameters were measured and converted into a problem involving N-port network structural design with the derived formula. Furthermore, a compact integrated detector was proposed by removing a redundant power divider. Additionally, one processing circuit was designed to compensate for the output voltages from the detector and calculate the microwave parameters. The detector fabrication process is compatible with GaAs monolithic microwave integrated circuit (MMIC) process. Experimental results indicate that the revised detector is at least 35% smaller than that obtained using existing methods. This approach can detect multiple parameters, including frequency, power, and phase detection on a monolithic chip.
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