Abstract
The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput, but also to achieve a clean system without oil vapour contamination. In the paper, the pressure in differential stages are calculated; the differential pumping system design and equipment choice are introduced; the tests of MBP, a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experiment result and analysis is presented.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
