Research and development of processes of vacuum ion-plasma parts surface treatment

Abstract

The application of electron-ion-plasma technologies for increasing the service life of machine parts, tools and technological equipment has been investigated. The technology of vacuum ion-plasma surface treatment is proposed for the deposition of coatings, which makes it possible to create internal, external and combined coatings. The manufacturability of coating methods is largely determined by the level of the developed equipment. The entire technological process of deposition of wear-resistant coatings on parts of friction units is carried out in one cycle on a BRV600F vacuum unit, which is equipped with all the necessary technical means. A method has been developed for the technology of obtaining a superhard carbon-metal coating with desired properties, namely, improving the quality of diamond-like films by changing their structure and composition, while the lower layer should have high adhesion to the substrate material, the middle layer should have high hardness and increased wear resistance, and the upper layer should have good thermal conductivity and heat resistance with low coefficient of friction.