Research about Flexible PDMS Micro-Perforated Panel Based on MEMS Silicon Mold

Abstract

Micro-perforated panel (MPP) is known for its remarkable noise absorption capability and has been studied and developed for decades. Although the panel and cavity walls of traditional MPP are rigid, some previous works have shown that the absorption bandwidth of flexible MPP can be improved by the vibration of the panel. But this result is only tested at low frequencies. In this paper, the flexible MPP aiming at high frequency range is studied under a control experiment. But the perforations of high frequency MPP are in the range of micron and difficult to be fabricated in traditional mechanical methods. A new process, based on MEMS silicon mold technology and PDMS casting method, is developed to meet this challenge. Experimental results show that the noise absorption bandwidth of flexible MPP does get widened conspicuously only at a little sacrifice of absorption peak.