Reprogrammable optical metasurfaces by electromechanical reconfiguration.

Abstract

Metasurfaces, with artificially designed ultrathin and compact optical elements, enable versatile manipulation of the amplitude, phase, and polarization of light waves. While most of the metasurfaces are static and passive, here we propose a reprogrammable metasurface based on the state-of-art electromechanical nano-kirigami, which allows for independent manipulation of pixels at visible wavelengths through mechanical deformation of the nanostructures. By incorporating electrostatic forces between the top suspended gold nano-architectures and bottom silicon substrate, out-of-plane deformation of each pixel and the associated phase retardation are independently controlled by applying single voltage to variable pixels or exerting programmable voltage distribution on identical pixels. As a proof-of-concept demonstration, the metasurfaces are digitally controlled and a series of tunable metasurface holograms such as 3D dynamic display and ultrathin planar lenses are achieved at visible wavelengths. The proposed electromechanical metasurface provides a new methodology to explore versatile reconfigurable and programmable functionalities that may lead to advances in a variety of applications such as hologram, 3D displays, data storage, spatial light modulations, and information processing.