Abstract
From the viewpoint of application of nonlinear dynamics, we report multifunctional operation in a single microelectromechanical system (MEMS) resonator. This paper addresses a reprogrammable logic-memory device that uses a nonlinear MEMS resonator with multi-states. In order to develop the reprogrammable logic-memory device, we discuss the nonlinear dynamics of the MEMS resonator with and without control input as logic and memory operations. Through the experiments and numerical simulations, we realize the reprogrammable logic function that consists of OR/AND gate by adjusting the excitation amplitude and the memory function by storing logic information in the single nonlinear MEMS resonator.
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