Abstract
We have reproducibly fabricated suspended tungsten electrodes with a gap of less than 2 nm on a suspended silicon nitride membrane with a slit. Our fabrication technique is based on the local deposition of tungsten by a focused ion beam. The length of the nanogap between the electrodes was controlled by detecting a tunneling current during the growth of the tungsten electrodes from both sides of the slit. The gap length can reach about 1 nm, which corresponds to the size of a single molecule such as a fullerene.
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