Abstract
The reproducibility of an elemental analysis of thin CIGS solar cell films by laser-induced breakdown spectroscopy (LIBS) is assessed. A Q-switched Nd:YAG laser (λ = 532 nm, τ = 5 ns, top-hat profile) and an ICCD detector were used for the LIBS measurements. It was shown that the concentration ratios and depth profile of a CIGS sample with unknown composition could be predicted with high precision by using the calibration curves generated with reference CIGS samples. The spot-to-spot relative standard deviation of 1.4% could be achieved for (Ga + In)/Cu at the gate delay of 0.1 μs condition, demonstrating that LIBS can be applied for real time monitoring of the elemental composition of CIGS thin films.
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