Reply to the “Statement on the article by C.D. Suen et al. (J. Vac. Soc. Jpn. 37 (1994) 700) by Chen Pijin”

Abstract

My reply to the statment of Chen Pijin is as follows1. In order to develop the XHV measurement, we (Y. H. Kuo at Beijing University, J. Z. Chen at Shanghai Lamp Factory and I) have been conducting research on the axial-emission ionazation gauge since the end of the 70's. Based on the axial-emission ionization gauge (AEG), five kinds of modified AEG have been developed. We have published many papers describing our achievements in IVC-9, IVC-10, IVC-11, IVC-12 and in J. Vac. Sci. & Technol. (USA), Vacuum (UK) and J. Vac. Soc. Jpn from 1982 to 1992, most of which are cited in “Mini-Axial-emission Ionization Gauge with a Ring Anode” as referneces.2. In order to realize smaller dimensions and simpler construction of AEG for UHV and XHV measurements, the mini-axial-emission ionization gauge with a ring anode was developed. It is a modification of the AEG and the oscillator mini-ion gauge (OMG) which was developled by Chen Pijin et al. Thus, Chen's paper is cited in our paper.3. We fabricated six mini-axial-emission ionization gauges with a ring anode (MAEG) as sample gauges for our initial experiment. According to our results we wrote this paper. We describe the results of the above mentioned experiment in our paper. After our paper was published, we learned of another paper Chen Pijing. “Prospects on the electron oscillator mini-ion-gauge with a ring anode”. In this paper, there are two brief schematic construction diagrams which are similar to MAEG, but there are no experimental curves or detailed data. If we had known of this study prior to publication of our own, we would have cited it as a reference.4. Our gauge differs in construction, materials and electrical parameters from Chen Pijin's gauge, as shown in the following table.