Abstract

This study focuses on NF/sub 3/ removal by a tandem hybrid system comprised by a BaTiO/sub 3/ packed-bed plasma reactor and adsorbent filter. Detailed plasma chemical kinetics in O/sub 2/-H/sub 2/-N/sub 2/-NF/sub 3/ gas mixture and by-product analysis are presented. The laboratory-scale atmospheric pressure packed-bed plasma reactor/adsorbent filter hybrid system for NF/sub 3/ removal is successfully demonstrated. A 100% removal efficiency is achieved by the hybrid system for 5000 ppm NF/sub 3/ and residence time less than 10 sec.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.