Abstract
Selective oxidation of amorphous hydrocarbon (a-C:H) films deposited on tungsten, molybdenum, and stainless steel by chemically active oxygen (with a source of glow discharge in air) has been studied. Film oxidation was carried out both directly in the discharge and in the area of afterglow. It has been shown that plasmolysis products of a-C:H films in air are CO, CO2, H2O, and H2. The rate of film oxidation depended on the position in relation to plasma and decreased in the hollow cathode-positive column-afterglow series. The coefficients of carbon erosion in afterglow increased from 10−3 to 10−2 at. C/at. O at a temperature increase from room temperature to 130°C.
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