Removal of Carbonaceous Residue with Wet Hydrogen in Greensheet Processing for Multilayer Ceramic Module: I, Residue Formation and Intrinsic Chemical Kinetics

Abstract

An experimental and mathematical investigation of the removal of carbonaceous residue deposited on the ceramic substrate in the fabrication of multilayer ceramic modules has been conducted. Such carbonaceous residue is formed when the organic binder is pyrolyzed during the firing of greensheets. This Part I is concerned specifically with the formation of carbonaceous residue and the intrinsic kinetics of its subsequent removal in a mixture of water vapor with hydrogen. The reaction is of first order with respect to the amount of the carbonaceous residue and depends on the water vapor and hydrogen partial pressures according to a Langmuir‐Hinshelwood kinetic expression.