Abstract
Ultraviolet induced nanoparticle colloid jet machining is a new ultra-precision machining technology utilizing the reaction between nanoparticles and the surface of the workpiece to achieve sub-nanometer ultra-smooth surface manufacturing without damage. First-principles calculations based on the density functional theory (DFT) were carried out to study the atomic material removal mechanism of nanoparticle colloid jet machining and a series of impacting and polishing experiments were conducted to verify the mechanism. New chemical bonds of Ti-O-Si were generated through the chemical adsorption between the surface adsorbed hydroxyl groups of the TiO2 cluster and the Si surface with the adsorption energy of at least −4.360 eV. The two Si-Si back bonds were broken preferentially and the Si atom was removed in the separation process of TiO2 cluster from the Si surface realizing the atomic material removal. A layer of adsorbed TiO2 nanoparticles was detected on the Si surface after 3 min of fixed-point injection of an ultraviolet induced nanoparticle colloid jet. X-ray photoelectron spectroscopy results indicated that Ti-O-Si bonds were formed between TiO2 nanoparticles and Si surface corresponding to the calculation result. An ultra-smooth Si workpiece with a roughness of Rq 0.791 nm was obtained by ultraviolet induced nanoparticle colloid jet machining.
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