Abstract
A novel approach to remotely monitor low pressure non-equilibrium plasmas is reported. A magnetic field antenna is positioned in the near field of a capacitively coupled plasma. Magnetic flux from plasma currents, present near the viewport, is intercepted by a calibrated loop antenna placed outside the chamber. The induced signal current is correlated to bulk plasma currents. The comparison of relative harmonic amplitudes shows resonance features for lower operating pressures. The geometric resonance and electron–neutral collision frequencies are evaluated from resonant harmonic features. This approach advances remote, noninvasive, and installation-free plasma monitoring, which is of particular interest to industrial scenarios.
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