Abstract
An electromagnetic field can be exploited for remote powering and control of microsystems. An interesting case is the application to microrobotics, which is an important field of research. Many applications are expected, particularly in the field of the microassembly and the test of circuits in confined environments [1]. This chapter describes the underlying principles and reports the successful asynchronous remote operation of two Distributed Micro Mechanical Systems (DMMS) by inductive coupling. The intelligence of the system is provided by a custom high-voltage controller IC providing the link between the power and data on the receiver antenna on one side, and the actuators and eventually sensors of the microrobot on the other side. Details on the antenna design in order to optimize the inductive coupling are given. The demonstrator achieved the independent remote control of two arrays of 1,700 electrostatic actuators, having a total capacitance of 2 nF.
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