Abstract
This paper proposes a computational model of a mass-sensitive chemical sensor with plasma-organic-polymer-film-coated quartz crystal resonators. The model is designed for use in sensor signal processing to develop a high-performance electronic nose system. Assuming a one-dimensional Fickian diffusion of sample gas molecules, the diffusion equations represent the dynamic responses of the chemical sensor to sample gas molecules in a neighbourhood space of the surface and bulk of a sensor film. Laplace transform is used to solve the governing equations, and the chemical sensor response can be calculated by applying a numerical inversion of the Laplace transform to the computational model of the chemical sensor. The numerical results calculated by the computational model are compared with the sensor responses obtained using a gas-sensing system, and the results show the feasibility of the proposed model for estimating the dynamic responses of the chemical sensor.
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