Abstract
Clean Si( hhk) surfaces and their vicinal surfaces, especially surfaces between the (113) and (114) surfaces, were studied by ultra-high vacuum reflection electron microscopy (REM) and diffraction (RHEED). The observations were carried out on inner cylindrical surfaces (0.4 mm in diameter) formed in Si(110) specimens (1 × 7 × 0.4 mm 3). On the cylindrical surfaces 13 flat surfaces were recognized. REM images and RHEED patterns showed that vicinal surfaces between the (113) and (114) surfaces were composed of terraces of the (113) and (114) surfaces and the structures depended on the direction of the DC current heating the specimen.
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