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Abstract
In the calculation of atomic mixing processes induced by energetic ion beams in solids, a key quantity is the relocation cross-section. Very few analysis of these quantities are available for specific targets, and even in the relatively simpler collisional stage of cascade evolution uncertainties still exist as to the correctness of available estimates. The results of a test case study are reported, where a well defined situation is investigated using two theoretical tools, Molecular Dynamics and Analytical Theory. The model case refers to bulk relocations produced in a silicon target by low-energy self recoils. Of special interest is to find ways to improve the theoretical estimates of relocation parameters which may then be used to predict the more complicated fluence dependent evolution of the concentration profile of irradiated targets.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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