Abstract
Reducing the deformation of the optical reference cavity under vibration is one of the key technologies to improve the laser frequency stability of the optical clock. Finite element analysis (FEA) is the main method to study the deformation of the optical reference cavity, but the relative length change of the optical reference cavity needs to be measured with an accuracy of 10-12/g. At present, under such accuracy requirements, it is necessary to systematically study the reliability of numerical results in the micro deformation of the ultra-stable reference cavity. In this paper, the difference of vibration sensitivity of optical reference cavity calculated by three kinds of commercial FEA software and the influence of the number of elements on the vibration sensitivity of optical reference cavity are studied. The results of this paper are helpful to the optimization design of vibration sensitivity of optical reference cavity and the reliability of numerical simulation of vibration sensitivity.
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