Abstract
Lifetime testing results of an electrostatically actuated microelectromechanical systems (MEMS) switch with Pt-Pt contact are presented. Moveable electrode of the switch is an aluminium beam with platinum contact bumps, which comes in contact with platinum thin-film electrodes. The switch operates in a cold DC mode. Testing is performed at several levels of the input current. Dependence of the switch resistance in the “on” state on the number of actuation cycles is measured. Lifetime of the device is limited by the sharp increase of the on-resistance up to 100 MΩ and depends on the switch design and the input current. Morphology and chemical composition of the contacting surfaces are investigated and mechanisms of the contact degradation are determined.
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