Reliability aspects of packaging and integration technology for microfluidic systems

Abstract

This paper presents the reliability aspects of an integrated microfluidic-system-interface (MSI) technology for complex microfluidic systems. MSI technology provided three primary functional interface components: microfluidic interconnects, integrated microvalves, and optical windows. The microfluidic interconnects were designed to facilitate complex micro-to-macro fluid interfacing between the microsystem and the macro world in a single package. The functionality and reliability of the fluid interconnects were tested using standard capillary tubing. The pneumatic microvalves were integrated directly into the microfluidic interface. The valve leak-rate characteristics and the bonding stability between the integrated microfluidic interface and the microfluidic system were tested against the pneumatic-valve pressure. Use of the optical windows in the interface was demonstrated by enabling an on-chip infrared polymerase-chain-reaction (PCR) process. This paper demonstrates the use of MSI technology as a facile and reliable interface/packaging method for a complex microfluidic system.