Abstract

Pb0.5Sr0.5TiO3 (PST) ferroelectric films were deposited onto Pt/Ti/SiO2/Si substrates by pulsed laser deposition. The state of the films can be described as a mixed state, with both ferroelectric and relaxor-like features. The films exhibited high dielectric constant and tunability at room temperature. At 10 kHz, the dielectric constants of the 200-nm- and 400-nm-thick films are 771 and 971, with the tunability of 60.2% and 70.9%, respectively. The temperature-dependent dielectric properties were studied and the relaxor-like behavior was observed in both the thinner and thicker PST films, which can be established in terms of diffuse phase transition characteristics and Vögel–Fulcher relationship. In addition, the contribution of the film–electrode interface layer to the dielectric properties was evaluated and the true dielectric properties of the films were reconstructed. Consequently, the relaxor-like character of the PST films was mainly ascribed to the effect of the film-electrode interfaces.

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