Abstract
The kinetics of formation of open submonolayer films on massive substrates has been investigated under the condition that the lateral interaction between particles of the adsorption layer (adlayer) has an attractive character. The case where the characteristic times of surface diffusion are considerably shorter than the adsorption times has been analyzed. A functional dependence of the coverage dispersion on the time has been obtained. Based on the numerical solution of the dispersion equation, it has been found that, at early stages of the dispersion evolution, there exists an incubation period in the development of inhomogeneities, and at late stages, there is an intermediate asymptotic of the relaxation process.
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