Abstract
In this paper, we investigated the source/drain recessed contact structure to mitigate the self-heating-effects in vertically stacked-nanowire FETs. As a result, lattice temperature of nanowire regions during device operation was considerably decreased by using the source/drain recessed contact structure. This is attributed to an increase in heat dissipation mainly from heat source to bulk wafer. Moreover, we proposed the p/n-stacked nanowire on bulk FinFET and its 6T-SRAM layout. Area of the proposed SRAM was reduced approximately 15%, as compared to the conventional cell layout.
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