Relationship between the fifth order aberration coefficients in electron optical deflective focusing system

Abstract

Relationships between aberration coefficients up to the fifth order have been derived using symplectic conditions for a rotationally invariant electron optical deflective focusing system. These relationships show that the third and fifth order coefficients correlate and a part of the fifth order aberration coefficients can be calculated by the third order coefficients. Using these relationships, we side checked a computer code for the fifth order aberration analysis with a differential algebra method.