Abstract
In this paper, the micro-structure and laser damage threshold of nano- ZrO 2 thin films were investigated. High-purity nano- ZrO 2 particles as the coating materials of samples were prepared by the electron beams evaporation. The micro-structure and crystallitic size of samples were analyzed by X-ray diffraction, a laser by 1064nm, 10ns, 3Hz Nd:YAG laser damage test each for nano- ZrO 2 films. The results showed that oxygen partial pressure has an important influence on the micro-structure of nano- ZrO 2 films, also found that the crystallitic size and different micro-structure influenced the laser damage threshold. The obtained results showed that laser damage threshold of polycrystalline structure is obviously higher than that of amorphous structure.
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