Relations between structural and electronic properties of SnO 2 polycrystalline thin films prepared by the aerosol MOCVD technique

Abstract

Thin polycrystalline films of undoped SnO 2 have been prepared by aerosol metal-organic chemical vapour deposition on single-crystal MgO(100) and glass ceramic substrates at deposition temperatures T s = 300–800 ° C. From electrical and X-ray diffraction measurements, the effect of substrate nature and T s on the electronic and structural parameters was studied. The size of crystalline grains and their bulk electrophysical characteristics were weakly dependent on the substrate nature and T s . At the same time, preferential grain orientation and subsequently film texture character were determined by the above-mentioned factors. The observed behavior of the film's electrical properties and gas sensitivity was attributed to a variation of texture character.