Abstract
In this paper, structural state, relation between “disordered” and graphite carbon clusters, and mechanical properties of two types of metal-carbon have been investigated. The first type of hydrogen-free a-C,(Cu, Ni, Zr) film is formed using the cathodic arc-vacuum deposition (CAVD) by applying the negative bias potential of 20kV to the sample. The second one of a-C:H,Cu coatings is obtained by means of the plasma-enhanced chemical vacuum deposition (PECVD) in the mixture of Ar+CH4 gases. It is established that as a result of PECVD of copper in the Ar+CH4 gas mixture a-C:H,Cu films with the concentration of C from 0 to 75at.% depending on CH4 content are formed. The percentage of graphite clusters increases the Yong module and wear resistance decreases with the carbon concentration increase up to 60% and more. Hydrogen-free a-C(Cu,Ni) films obtained by CAVD have higher hardness and wear resistance, higher Id/Ig relation than a-C:H,Cu films. During a-C,Zr film deposition one can observe the formation of ta-C carbon having a high concentration of sp3-bonded carbon that provides the highest hardness (up to 15GPa) and wear resistance of a composite film.
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