Relation between Al vacancies and deep emission bands in AlN epitaxial films grown by NH3-source molecular beam epitaxy

Abstract

Intensity ratios of characteristic deep cathodoluminescence (CL) bands at 4.6, 3.8, and 3.1eV to the near-band-edge emissions at 11K of AlN epilayers grown by NH3-source molecular beam epitaxy were correlated with the change in the S parameter of positron annihilation measurement, which represents the concentration or size of Al vacancies (VAl). Since the relative intensities of 3.1 and 3.8eV bands increased remarkably with lowering supply ratio of NH3 to Al (V/III ratio) and growth temperature (Tg), they were assigned to originate from VAl-O complexes. The VAl concentration could be decreased by adjusting V/III ratio and Tg, resulting in observation of fine excitonic features in the CL spectra. From the energy separation between the ground and first excited states, the binding energy of A exciton was determined to be 48meV.