Abstract

The defect properties of Ta3N5 (110) surface are studied by first-principles calculation. We focus on the formation of three typical defects, oxygen impurity, nitrogen vacancy, and magnesium impurity and further emphasize their roles on changing the electronic structure and band edge position of the surface. Our results show that Mg is more easily doped on (110) surface in nitrogen-rich condition, in which the formation of co-defects is energetically more favorable. These co-defects can reduce the influence of single defects on the electronic structure and band edge position of the (110) surface.

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