Abstract

The features of firing aluminitride substrates, characterized by a high temperature of more than 1800 0С and the presence of a reducing environment, are described. It is shown that the high quality of substrates in parallelism, thermal conductivity, and other properties can be achieved, along with the establishment of optimal firing modes, using a special design of a capsule based on boron nitride, which is a container that consists of a body - a box of rectangular cross section, bottom and plane-parallel dividing plates with supports. To create a local (inside the capsule) clean recovery medium, thorn-groove interlocks between the body and the bottom are provided, filled with a heat-resistant inert powder.

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