Abstract
A buried planar Nd:YAG waveguide has been fabricated by 20-MeV N-ion implantation. From Raman and optical characterization, it has been found that the refractive index has a larger increase when the crystal damage is heavier. According to our analysis, this crystal damage is caused by the electronic energy loss in the first several micrometers of irradiated regions, while nuclear energy loss also acts on the damage near the end of the ion range. This work is helpful to understand the mechanisms of swift-heavy-ion-implanted Nd:YAG waveguide formation.
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