Abstract
A new high-precision reflectometer for the visible and ultraviolet ranges was constructed. Normal incidence of light and computer support were applied. Experimental data for the surface microroughness analysis are presented. Knowledge of the reflectance in a given energy range in conjunction with the ellipsometric results for one energy point can provide the complete spectra of optical constants by means of a Kramers-Kronig analysis. A comparison between the calculated n and k spectra and the measured ones for GaAs is presented.
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