Abstract
The design, fabrication and performance of a reflection-type tunable phase shifter based on a lead zirconate titanate (PZT) thin-film process is presented. The phase shifter consists of a coplanar waveguide Lange coupler on high resistivity silicon (HRSi) and two ferroelectric PZT varactors. At 12 GHz, the varactors achieve a capacitance tuning range of 5.5 to 1 along with a phase shift of 86 with bias voltages in the range 0-26 V. Analysis of the losses due to the varactors and the rest of the phase shifter is also presented.
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