Abstract
An analysis of the influence of nanoscopically stratified dielectric overlayer on the reflection parameters of linearly polarized light from transparent substrates is carried out. The second-order formulas for characteristic Brewster angles are derived and their accuracy is estimated by using exact numerical methods for the solution of the inhomogeneous reflection problem. The possibilities are discussed for determining the parameters of nanometre-scale dielectric layers by means of characteristic reflection angles. A novel scanning angle differential reflectance method in the vicinity of the classical Brewster angle, whose sensitivity is in principle the same as that of ellipsometry, is developed.
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