Abstract
We compare different methods to measure reflection high-energy electron diffraction oscillations on rotating substrates. The best signal-to-noise ratio as well as the highest accuracy is obtained by measuring the full width at half maximum of the specular spot perpendicular to the surface. The accuracy of the method is well within 1% and offers a practical way to accurately determine growth rates for device fabrication.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
