Abstract
A comparison between light reflection from inhomogeneous and uniaxially anisotropicdielectric films on isotropic and homogeneous substrates is carried out. The reflection frominhomogeneous and uniaxially anisotropic ultrathin films is analyzed using the equationsobtained in a long-wavelength approximation. Numerical calculations based onrigorous electromagnetic reflection theory for inhomogeneous and anisotropicinterference films are also realized. It is shown that in the case of the absorbingsubstrate the reflection properties of an ultrathin inhomogeneous dielectric film, therefractive index of which varies only in the direction perpendicular to the layer,are equivalent to the reflection properties of a uniaxially anisotropic ultrathinfilm, the optical axis of which is normal to the film surface. For interference filmson absorbing materials such equivalency takes place only in the case of weaklyinhomogeneous films. For dielectric films on transparent substrates it is generallylacking. Solely ellipsometric angles for inhomogeneous and uniaxially anisotropicultrathin films are equal in the first order in the ratio of film thickness to wavelength.
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