Abstract
An ultrasonic micro-spectrometer (UMSM) was developed to measure the reflection coefficient of a solid specimen at a small spot on its surface. A prototype system operates in a frequency range from 20 to 150 MHz, and in an incident angle from 20 degrees to 40 degrees . The stability of the UMSM is experimentally evaluated. The leaky Rayleigh wave velocity is measured by observing the phase change of the reflection coefficient, and the stability of successive measurements on a single spot is less than +or-0.08% of the average value. It is shown that the anisotropic reflection coefficient can be stably measured. The measurement is also attempted on a spot of the specimen surface as small as 220 mu m in diameter. >
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