Reflect type DC-20 GHz MMIC high performance SPST and SPDT switches

Dai Yongsheng Dai Yongsheng,Chen Tangsheng Chen Tangsheng,Liu Lin Liu Lin,Chen Xiaojian Chen Xiaojian,Gao Shuping Gao Shuping,Lin Jinting Lin Jinting,Li Hui Li Hui,Yang Lijie Yang Lijie

doi:10.1109/icmmt.2000.895659

Reflect type DC-20 GHz MMIC high performance SPST and SPDT switches

Dai Yongsheng Dai Yongsheng, Chen Tangsheng Chen Tangsheng + Show 6 more

https://doi.org/10.1109/icmmt.2000.895659

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Publication Date: Sep 14, 2000

Citations: 3

Affiliation: Nanjing Institute of Technology

#Single-pole Single-throw #Single-pole Double-throw + Show 8 more

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Abstract

The design, fabrication, and performance of high performance reflect type DC-20 GHz single-pole single-throw (SPST) and single-pole double-throw (SPDT) MMIC switches are described in this paper. Low insertion loss (/spl les/2.5 dB), low input/output VSWR (/spl les/1.4), and high isolation (/spl ges/47 dB) over DC to 20 GHz band are exhibited. The SPST switch's chip size is 2.6 mm/spl times/1.1 mm/spl times/0.1 mm, and the SPDT switch's chip size is 3.5 mm/spl times/1.3 mm/spl times/0.1 mm. These chips were fabricated by an ion implanted MMIC process and PCM technology to ensure a high yield and good uniformity between wafers and chips.

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