Abstract
Using high-efficiency bead milling dispersion technology, weakly agglomerated mixed nanoparticles were dispersed into a high solid content and low viscosity ITO slurry consisting of uniform single particles. The rheological properties of the slurry were studied as a function of the change in solid content and dispersant amount. The green ITO compacts with more uniform microstructure were prepared by mixing the slurry with high solid loading. Densification activation energies of the ITO compacts in different sintering atmospheres and different heating rate conditions were calculated by the MSC method based on shrinkage data. Finally, ITO ceramic targets with a grain size range of 3–6 μm were obtained by the two-step sintering method, and their phase structure was uniformly distributed.
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