Reference Electron Energy Spectra for Quantitative Auger Electron Spectroscopy (AES) : Cu(100), (110), and (111)

Abstract

We have developed a novel cylindrical mirror analyzer (CMA) for the quantitative Auger electron spectroscopy (AES) to obtain reference electron spectra. This CMA was defined in all respects, thus it yields an absolute electron energy distribution ; the energy resolution of 0.25% for 42.3° ± 6° of incidence angles (theoretically obtainable resolution), the estimated transmission of 6.2% (assuming cosine law), and the signal detection by the combination of Faraday cup and electrometer (SI traceable). The acceleration voltages for the primary electron beam were ranging 1 through 5000 volts and the energy range of the sweep was 0 through 5000 eV in 0.1 eV(min)/step for the whole range and 10 meV or even 0.1 meV/step for the limited narrow range. The energy calibration by using the primary acceleration voltage (SI traceable) and the spectral intensity correction for the relativity have been performed.The spectra for typical samples have already been published, i.e., C's(soot and graphite), Al(poly), Si(100and 111), Cr(poly), Fe(poly), Ni(poly), Cu(poly), Ga(liquid), Ag(poly), and Au(poly). Among the samples C's and Ga(liquid) seem to be convincing materials.