Abstract

We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force on the MEMS device, while the higher voltage on the drive electrode remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode’s modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

Highlights

  • Conventional electrostatic actuators suffer pull-in after displacing only approximately 1/3 of the electrode separation [1], thereby limiting the controllable displacement range

  • We introduce an intermediate electrode between the underlying drive electrode and the above MEMS structure, to modulate the electrostatic force on the MEMS structure

  • To demonstrate the theory of operation of the new tri-electrode topology, displacement studies were done for both cantilever and square membrane electrostatic actuators

Read more

Summary

Introduction

Conventional electrostatic actuators suffer pull-in after displacing only approximately 1/3 of the electrode separation [1], thereby limiting the controllable displacement range. The driver electrode must be placed distant from the MEMS structure when large controllable stroke is required. This leads to significantly elevated driving voltage, since the electrostatic force is proportional to the square of the separation distance. The perforated intermediate electrode has solid elements of width WE spaced WS apart, and electrode-spacing pitch L = WE + WS It is located a distance D1 below the MEMS structure and D2 above the drive electrode (held at a fixed voltage Vp). The electric field modulation enabled by the intermediate electrode in the space D1 is illustrated in the FEM simulation of Figure 2 This simulation has the MEMS held fixed.

Simulation Set-Up to Calculate MEMS Displacement
MEMS Displacement Simulation Results
Findings
Conclusions
Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.